Electret-based cantilever energy harvester: design and optimization

We report in this paper the design, the optimization and the fabrication of an electret-based cantilever energy harvester. We develop the mechanical and the electrostatic equations of such a device and its implementation using Finite Elements (FEM) and Matlab in order to get an accurate model. This model is then used in an optimization process. A macroscopic prototype (3.2cm^{2}) was built with a silicon cantilever and a Teflon\textregistered electret. Thanks to this prototype, we manage to harvest 17\muW with ambient-type vibrations of 0.2g on a load of 210M{\Omega}. The experimental results are consistent with simulation results

Adjustable Nonlinear Springs to Improve Efficiency of Vibration Energy Harvesters

Vibration Energy Harvesting is an emerging technology aimed at turning mechanical energy from vibrations into electricity to power microsystems of the future. Most of present vibration energy harvesters are based on a mass spring structure introducing a resonance phenomenon that allows to increase the output power compared to non-resonant systems, but limits the working frequency bandwidth. Therefore, they are not able to harvest energy when ambient vibrations' frequencies shift. To follow shifts of ambient vibration frequencies and to increase the frequency band where energy can be harvested, one solution consists in using nonlinear springs. We present in this paper a model of adjustable nonlinear springs (H-shaped springs) and their benefits to improve velocity-damped vibration energy harvesters' (VEH) output powers. A simulation on a real vibration source proves that the output power can be higher in nonlinear devices compared to linear systems (up to +48%).Comment: Please refer to paper "Nonlinear H-Shaped Springs to Improve Efficiency of Vibration Energy Harvesters", Journal of Applied Mechanics | Volume 80 | Issue 6, 2013 -- Paper No: JAM-12-1470; doi: 10.1115/1.4023961 -- for the published version of this articl

Electrostatic Conversion for Vibration Energy Harvesting

This chapter focuses on vibration energy harvesting using electrostatic converters. It synthesizes the various works carried out on electrostatic devices, from concepts, models and up to prototypes, and covers both standard (electret-free) and electret-based electrostatic vibration energy harvesters (VEH).Comment: This is an author-created, un-copyedited version of a chapter accepted for publication in Small-Scale Energy Harvesting, Intech. The definitive version is available online at: http://dx.doi.org/10.5772/51360 Please cite as: S. Boisseau, G. Despesse and B. Ahmed Seddik, Electrostatic Conversion for Vibration Energy Harvesting, Small-Scale Energy Harvesting, Intech, 201

Cantilever-based electret energy harvesters

Integration of structures and functions allowed reducing electric consumptions of sensors, actuators and electronic devices. Therefore, it is now possible to imagine low-consumption devices able to harvest their energy in their surrounding environment. One way to proceed is to develop converters able to turn mechanical energy, such as vibrations, into electricity: this paper focuses on electrostatic converters using electrets. We develop an accurate analytical model of a simple but efficient cantilever-based electret energy harvester. Therefore, we prove that with vibrations of 0.1g (~1m/s^{2}), it is theoretically possible to harvest up to 30\muW per gram of mobile mass. This power corresponds to the maximum output power of a resonant energy harvester according to the model of William and Yates. Simulations results are validated by experimental measurements but the issues of parasitic capacitances get a large impact. Therefore, we 'only' managed to harvest 10\muW per gram of mobile mass, but according to our factor of merit, this puts us in the best results of the state of the art. http://iopscience.iop.org/0964-1726/20/10/105013Comment: This is an author-created, un-copyedited version of an article accepted for publication in Smart Materials and Structures. IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The definitive publisher-authenticated version is available online at doi:10.1088/0964-1726/20/10/105013; http://iopscience.iop.org/0964-1726/20/10/10501

New DRIE-Patterned Electrets for Vibration Energy Harvesting

This paper is about a new manufacturing process aimed at developing stable SiO2/Si3N4 patterned electrets using a Deep Reactive Ion Etching (DRIE) step for an application in electret-based Vibration Energy Harvesters (e-VEH). This process consists in forming continuous layers of SiO2/Si3N4 electrets in order to limit surface conduction phenomena and is a new way to see the problem of electret patterning. Experimental results prove that patterned electrets charged by a positive corona discharge show excellent stability with high surface charge densities that may reach 5mC/m^2 on 1.1\mu m-thick layers, even with fine patterning and harsh temperature conditions (up to 250{\deg}C). This paves the way to new e-VEH designs and manufacturing processes.Comment: Proc. European Energy Conference, 201